Tools for performance optimization can also
aide in the design optimization of CVD reactors,
for example in
determining the number of heater zones.
The result of a performance optimization with a 24-zone furnace to achieve a uniform temperature distribution of 1027 C along the wafers indicates that the middle zones can be combined into a smaller number of heater zones (solid line in left picture). The performance optimization with the new 14-zone furnace configuration shows that the goal of a uniform temperature distribution can be achieved (see temperature distributions in the right picture). The optimized power settings for the 14-zone configuration (dashed lines in the left picture) indicate that a further reduction is possible and that the nine middle zones can be combined into one zone. (Full Picture)