Design Optimization

Typical design variables are the number of heater zones, the size and the position of heater zones, the insulation thickness, and the reactor geometry.

Tools for performance optimization can also aide in the design optimization of CVD reactors, for example in determining the number of heater zones.
The result of a performance optimization with a 24-zone furnace to achieve a uniform temperature distribution of 1027 C along the wafers indicates that the middle zones can be combined into a smaller number of heater zones (solid line in left picture). The performance optimization with the new 14-zone furnace configuration shows that the goal of a uniform temperature distribution can be achieved (see temperature distributions in the right picture). The optimized power settings for the 14-zone configuration (dashed lines in the left picture) indicate that a further reduction is possible and that the nine middle zones can be combined into one zone. (Full Picture)