Tools for performance optimization can also
aide in the design optimization of CVD reactors,
for example in
determining the number of heater zones.
The result of a performance optimization with a 24-zone
furnace to
achieve a uniform temperature distribution of 1027 C
along the wafers indicates that the middle zones
can be combined into a smaller number of heater zones
(solid line in left picture). The performance optimization with
the new 14-zone furnace configuration shows that the goal
of a uniform temperature distribution can be achieved
(see temperature distributions in the right picture).
The optimized power settings for
the 14-zone configuration (dashed lines
in the left picture) indicate that a further reduction
is possible and that the nine middle zones can be
combined into one zone.
(Full Picture)